Title Micro-Acoustic System (波動マイクロシステム)
Term Autumn Semester   Credits 2-0-0  
Assoc. Prof. Minoru Kuribayashi Kurosawa Suzukakedai G2 Building, Room 614 (ext.5598)
E-mail: mkur@ip.titech.ac.jp     
Assoc. Prof. Kentaro Nakamura Suzukakedai R2 Building, Room 718 (ext.5090)
E-mail: knakamur@sonic.pi.titech.ac.jp
  Based on the application of elastic wave and acoustic wave engineering, micro electro mechanical systems (MEMS) are lectured from the principle to modeling. MEMS is getting more and more important technology field in these days. The priceple, analysis method and modeling of electro-acoustic transducers which are very important in this field, are lectured. Opto-acoustical sensing system is lectured also.
  1. Elastic wave and vibration
  2. Piezoelectric equations and electro mechanical equivalent circuit
  3. Simple vibration mode electo mechanical transducers
  4. Vibro gyro scope: principle and modeling
  5. Principle of ultrasonic motors
  6. Modeling of ultrasonic motors
  7. Actuators and sensors using piezoelectirc film material
  8. Surface acoustic wave device: principle and modeling
  9. Surface acoustic wave motor
  10. Opto-acoust sensing
  11. Fiber optic micro sensors
【Texts, etc】
  Original materials will be deriverd.        
  "Ultrasonic electronics" is helpful for well understanding. 
【How to Grade】
  Final examination and short problems in each lecture.
【Message form the Lecturer】
  Starting from the basics of elastic vibration/wave phenomenon and piezoelectric transducers, electro mechanical equivalent circuit modeling is lectured. This modeling is effective to understand the quantitative relationshipt of the device operation.